Non-contact robotic hand for carriers
A robotic hand that inserts and removes wafers to and from a carrier without contact.
Wafers can be transported non-contact. The thin hand allows for the insertion and removal of wafers to and from the carrier. Usable in a clean room. Alignment is possible.
- Company:ソーラーリサーチ研究所 大阪事業所
- Price:Other